Abstract

ROMAN, Wilson S et al. Synthesis of dlc/bn nanostructured bilayer on si/si₃n₄ substrate grown By pulsed laser deposition. Rev. LatinAm. Metal. Mater. [online]. 2012, vol.32, n.1, pp.30-35. ISSN 0255-6952.

The Diamond like carbon and boron nitride (DLC/BN) bilayer thin films were deposited onto silicon and nitride silicon substrates (100), by pulsed laser deposition system (PLD). The deposition was conducted with Nd:YAG laser with a wavelength of 1064 nm. The growth of bilayer was carried out under argon atmosphere, using graphite and boron nitride targets both of high purity (99.99% and 99. 98%) respectively. The laser fluence was kept constant at 2 J/cm² during deposition processes; the substrate growth temperature was varied from 25°C to 300°C. The thickness was determined with a profilometer. The films produced were characterized by X-ray diffraction (XRD), spectroscopy Fourier transform infrared (FTIR), the chemical composition was analyzed via Energy Dispersive X-ray (EDS). The morphological study was analyzed via scanning electron microscopy (SEM), observing a morphological dependence as function of temperature deposition.

Keywords : Laser ablation; boron nitride (BN); DLC; nanostructures.